Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application
In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated.In a MDOF grating Foggers interferometry system, there are four diffraction beams from a two-axis scale grating and reference grating, respectively.For further modulation, these beams will propagate more than 100 mm, w